![]() ![]() In comparison to focal plane array based ToF 3-D cameras, laser scanners have an advantage of higher measurement accuracy due to scanning principle because only single measuring points are illuminated sequentially within the scanned field of view (FOV). Laser scanners are widely used for time-of-flight (ToF) three-dimensional (3-D) distance measurement systems. Flatness-based open loop control is used for driving control of quasistatic axis in order to compensate for the dynamics of the low damped MEMS system. This enables a distance measuring rate of 1 MVoxel/ s with an uncertainty in distance measurement of 3 to 5 mm for a 7.5-m measuring range for a gray target. To guarantee the full reception aperture of effectively 5 mm, a synchronized driven MEMS scanner array-consisting of five hybrid assembled MEMS devices-is used in an innovative 3-D ToF laser scanner. For position feedback, piezo-resistive position sensors are integrated on chip for both axes. ![]() This mirror is 2.6× 3.6 mm and operates at 1600 Hz with an 80-deg optical scan range. Large quasistatic deflections of ± 10 deg are provided by vertical comb drives in the vertical direction in contrast to resonant horizontal scanning. In: Motamedi E (ed) MOEMS and applications.This paper reports on a gimbaled MEMS scanning mirror with quasistatic resonant actuation, specially developed for adaptive raster scanning in an innovative three-dimensional (3-D) time-of-flight (ToF) laser camera with real-time foveation. Urey H, Dickensheets D (2004) Display and imaging systems. ![]() Trisnadi JI, Carlisle CB, Monteverde R (2004) Overview and applications of grating light valve (TM) based optical write engines for high-speed digital imaging. SID Symposium Digest Technical Paper 29:29–32 Spat Light Modul Appl III 1150:86–102, 205Īmm DT, Corrigan RW (1998) 5.2: Grating light valve technology: update and novel applications. Hornbeck LJ (1990) Deformable-mirror spatial light modulators. Hornbeck LJ (July-September 1998) From cathode rays to digital micromirrors: A history of electronic projection display technology. In: Proceedings of SPIE, San Jose, vol 4980, pp 1–11 IDW, Invited Paper LAD 2-2, ĭouglass M (2003) DMD reliability: a MEMS success story. Appl Phys Express 1:072201–1īhatia V et al (2007) High efficiency green lasers for mobile projectors. Okamoto K, Tanaka T, Kubota M (2008) High-efficiency continuous-wave operation of blue-green laser diodes based on nonpolar m-plane gallium nitride. News/Trade Press/Opto Semiconductors and LEDs/2009. Semiconductor Today, Compounds and Advanced Silicon (Jan 2010) Laser Focus World, Feb 2003Ĭooke M (2009) Semiconductor Today, Compounds and Advanced Silicon 4(8), Oct 2009 Steele R (2003) Laser Marketplace 2003, part II. In: Society for information display international symposium, SID Conference Digest, pp 1320–1323 In: MEMS, MOEMS, and micromachining, Strasbourg, pp 147–158īrown MK, Freeman M, Zobkiw C, Lewis J (2002) Image quality considerations in bi-sinusoidally scanned retinal scanning display systems. Sandner T et al (2004) Damping analysis and measurement for a comb-drive scanning mirror. IEEE J Microelectromechanical Syst 19:936–943 Optomechatronic Micro/Nano Compon Devices Syst 5604:218–229, 292Īrslan A, Brown D, Davis W, Holmstrom S, Gokce SK, Urey H (2010) Comb actuated resonant torsional microscanner with mechanical amplification. Urey H (2004) MEMS scanners for display and imaging applications. In: IEEE/LEOS international conference on optical MEMs and nanophotonics, Freiburg, Germany, pp 31–32 In: MOEMS and miniaturized systems VII, San Jose, vol 6887, pp 688702–11ĭavis WO, Sprague R, Miller J (2008) MEMS-based pico projector display. Yun SK et al (2008) A novel diffractive micro-optical modulator for mobile display applications. Silicon Light Machines: An innovative source of high-resolution imaging solutions. In: Bhowmik AK, Li Z, Bos PJ (eds) Mobile displays: technology and applications. Sprague R et al (2008) Mobile projectors using scanned beam displays. ![]()
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